IT2
- Project name
- 875999 IT2
- Period
- Jun 2020 - May 2023
- Call
- ECSEL-JU 2019
- Total Partners
- 33
- Member Partners
- 3
- Website
- No website
- EU Funding
- 20,83 M Euro
The overall objective of the IT2 project is to explore, develop and demonstrate technology options that are needed to realize 2nm CMOS logic technology extending the scaled Semiconductor technology roadmap to the next node in accordance to Moore’s law. These activities cover creation of Lithography equipment, new Processes & Modules and Metrology tools capable to create and deal with new 2nm node 3D structures, defect analysis, overlay and features.
