Project information

Project name
875999 IT2
Period
Jun 2020 - May 2023
Call
ECSEL-JU 2019
Total Partners
33
Member Partners
3
Website
No website
EU Funding
20,83 M Euro

The overall objective of the IT2 project is to explore, develop and demonstrate technology options that are needed to realize 2nm CMOS logic technology extending the scaled Semiconductor technology roadmap to the next node in accordance to Moore’s law. These activities cover creation of Lithography equipment, new Processes & Modules and Metrology tools capable to create and deal with new 2nm node 3D structures, defect analysis, overlay and features.

The overall objective of the IT2 project is to explore, develop and demonstrate technology options that are needed to realize 2nm CMOS logic technology extending the scaled Semiconductor technology roadmap to the next node in accordance to Moore’s law. These activities cover creation of Lithography equipment, new Processes & Modules and Metrology tools capable to create and deal with new 2nm node 3D structures, defect analysis, overlay and features.

Project leader

Name
Frans List
Organisation
ASML Netherlands B.V.
Country
Netherlands