Project information

Project name
662338 SeNaTe
Period
Apr 2015 - Mar 2018
Call
ECSEL-JU 2014
Total Partners
40
txt-member-partners
5
Website
No website
Eligible Costs
32,55 M Euro
EU Funding
32,25 M Euro

As world-class leaders in tooling for semiconductor manufacturing, European suppliers are well placed to develop tool capabilities for the next generation 7nm IC technology node (N7), keeping on the “Moore’s law” projection that aims for manufacturing devices in this technology in 2018. SeNaTe will develop a demonstration of 7nm IC technology integration using real-life devices at the Advanced Patterning Center of the IMEC pilot line. The main focus of the project is to support the European equipment and materials industry in its development of tools. This industry has 20% of the worldwide ma...

As world-class leaders in tooling for semiconductor manufacturing, European suppliers are well placed to develop tool capabilities for the next generation 7nm IC technology node (N7), keeping on the “Moore’s law” projection that aims for manufacturing devices in this technology in 2018. SeNaTe will develop a demonstration of 7nm IC technology integration using real-life devices at the Advanced Patterning Center of the IMEC pilot line. The main focus of the project is to support the European equipment and materials industry in its development of tools. This industry has 20% of the worldwide market share with ASML as top supplier in the area of lithography.

Project leader

Name
Gerold Alberga
Organisation
ASML Netherlands B.V.
Country
Netherlands